Title:
FILTRATION DEVICE, PURIFICATION DEVICE, AND METHOD FOR PRODUCING CHEMICAL SOLUTION
Document Type and Number:
WIPO Patent Application WO/2019/181580
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a filtration device which makes it possible to produce a chemical solution having excellent defect suppression performance; a purification device; and a method for producing a chemical solution. The filtration device is provided with an in-flow section, an out-flow section, a filter A and at least one filter B that is different from the filter A, wherein the filter A and the filter B are arranged in series between the in-flow section and the out-flow section and have a circulation passage extending from the in-flow section to the out-flow section, and a solution of interest is purified to produce a chemical solution in the filtration device. In the filtration device, the filter A comprises at least one membrane selected from the group consisting of a first porous membrane and a second porous membrane, wherein the first porous membrane comprises a porous substrate made from polytetrafluoroethylene and a non-crosslinked coating that is formed so as to cover the porous base material and contains a perfluorosulfonic acid polymer and the second porous membrane contains polytetrafluoroethylene blended with a perfluorosulfonic acid polymer.
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Inventors:
SHIMIZU TETSUYA (JP)
KAMIMURA TETSUYA (JP)
OMATSU TADASHI (JP)
TAKAHASHI SATOMI (JP)
KAMIMURA TETSUYA (JP)
OMATSU TADASHI (JP)
TAKAHASHI SATOMI (JP)
Application Number:
PCT/JP2019/009500
Publication Date:
September 26, 2019
Filing Date:
March 08, 2019
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B01D61/18; B01D61/14; B01D61/58; B01D69/00; B01D69/02; B01D69/10; B01D69/12; B01D71/26; B01D71/28; B01D71/32; B01D71/36; B01D71/40; B01D71/56; B01D71/68; G03F7/26
Domestic Patent References:
| WO2018043697A1 | 2018-03-08 | |||
| WO2017188209A1 | 2017-11-02 |
Foreign References:
| JP2016073922A | 2016-05-12 | |||
| JP2013218308A | 2013-10-24 | |||
| JP2017029975A | 2017-02-09 | |||
| JP2017039117A | 2017-02-23 |
Attorney, Agent or Firm:
NAKASHIMA Junko et al. (JP)
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