Title:
FILTRATION FILTER AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/128235
Kind Code:
A1
Abstract:
Provided is a filtration filter with which a stable opening size during filtration is obtained, and which can be easily regenerated when clogged and used repeatedly. The filtration filter (10) comprises: a substrate stack wherein substrates (11) that have a through hole that penetrates from front to back are stacked; stoppers (15) that define the spacing between the substrates (11); and pillars (16) with a larger thermal expansion coefficient than the stoppers (15). The lengths of the pillars (16) are made to be longer than the lengths of the stoppers (15). The spacing between the substrates (11) at normal temperature is defined at least by the stoppers (15), and the spacing during heating is defined by the thermally expanded pillars (16). The gaps between the substrates (11) form the filtration surface that traps contaminants contained in the liquid that is being treated (A).
Inventors:
MORIYA TSUYOSHI (JP)
YAMASHITA ASAO (JP)
YAMASHITA ASAO (JP)
Application Number:
PCT/JP2012/056953
Publication Date:
September 27, 2012
Filing Date:
March 13, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
MORIYA TSUYOSHI (JP)
YAMASHITA ASAO (JP)
MORIYA TSUYOSHI (JP)
YAMASHITA ASAO (JP)
International Classes:
B01D29/46; B01D29/62; B01D29/66; B01D39/10; B01D39/16; B01D39/20; B01D65/02; B01D69/02; B01D71/02; B01D71/64
Foreign References:
| JPS63107712A | 1988-05-12 | |||
| JP2002186810A | 2002-07-02 | |||
| JP2007130532A | 2007-05-31 | |||
| JP2003210916A | 2003-07-29 |
Attorney, Agent or Firm:
BECCHAKU, Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
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Claims:
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