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Patent Searching and Data


Title:
FINE MASK PLATE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/120382
Kind Code:
A1
Abstract:
A fine mask plate and a manufacturing method thereof are provided. The fine mask plate comprises a mask frame (15), a first mask formed of metal (11), and a second mask formed of an organic material (12). A plurality of first pixel openings (111) are formed on the first mask (11). One or more second pixel openings (121) are formed in each area of the second mask (12) respectively corresponding to one of the first pixel openings (111). Since the second pixel opening (121) formed in the area corresponding to one of the first pixel openings (111) is smaller than a conventional FMM in terms of pixel opening size, a smaller OLED device can be manufactured by the fine mask plate in a vacuum evaporation process, increasing the resolution of an OLED display product. In addition, since an opening wall slope of the second pixel opening (121) can be controlled to be smaller, an incidence angle of evaporation material at an edge of the second pixel opening (121) can be smaller in the vacuum evaporation process, reducing a coating film shadow region and increasing the resolution of the OLED display product.

Inventors:
MU JUNYING (CN)
Application Number:
PCT/CN2017/073882
Publication Date:
July 05, 2018
Filing Date:
February 17, 2017
Export Citation:
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Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
C23C14/04; C23C14/24
Foreign References:
CN106029939A2016-10-12
CN104053812A2014-09-17
CN105745352A2016-07-06
CN105720083A2016-06-29
CN105821373A2016-08-03
JPH1029293A1998-02-03
Attorney, Agent or Firm:
COMIPS INTELLECTUAL PROPERTY OFFICE (CN)
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