Title:
FINE PARTICLE DISPERSION METHOD, AND DEPOSITION METHOD AND DEPOSITION DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/163189
Kind Code:
A1
Abstract:
A fine particle dispersion method wherein a liquid 13 containing fine particles is irradiated with plasma.
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Inventors:
NAMIHIRA TAKAO (JP)
SUZUKI RYOKO (JP)
NISHI YASUTAKA (JP)
SUZUKI RYOKO (JP)
NISHI YASUTAKA (JP)
Application Number:
PCT/JP2018/037729
Publication Date:
August 29, 2019
Filing Date:
October 10, 2018
Export Citation:
Assignee:
UNIV KUMAMOTO NAT UNIV CORP (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
B01J19/08; B05B1/00; B05D7/24
Domestic Patent References:
| WO2017154937A1 | 2017-09-14 | |||
| WO2007122956A1 | 2007-11-01 |
Foreign References:
| JP2014019782A | 2014-02-03 | |||
| JP2006216468A | 2006-08-17 | |||
| JP2016161791A | 2016-09-05 |
Attorney, Agent or Firm:
SHOYO INTELLECTUAL PROPERTY FIRM (JP)
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