Title:
FINE PATTERN FORMING METHOD AND FINE PATTERN FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/003921
Kind Code:
A1
Abstract:
A fine pattern forming method and a fine pattern forming device. In the method for realizing a high aspect ratio structure which could not be achieved by a conventional technology, a mold on which a fine pattern having a fine recessed and projected structure is pressed against a patterning material to form the fine pattern with the fine recessed and projected structure on the patterning material. The method comprises a first step for pressing the mold, on which the fine pattern with the fine recessed and projected structure is formed, against the patterning material, a second step for moving, relative to each other, the pressed mold and the patterning material in a direction orthogonal to the pressing direction, and a third step for releasing the pressing of the mold against the patterning material and withdrawing the mold from the patterning material.
Inventors:
OKINAKA MOTOKI
TSUKAGOSHI KAZUHITO
AOYAGI YOSHINOBU
TSUKAGOSHI KAZUHITO
AOYAGI YOSHINOBU
Application Number:
PCT/JP2005/011925
Publication Date:
January 12, 2006
Filing Date:
June 29, 2005
Export Citation:
Assignee:
RIKEN (JP)
OKINAKA MOTOKI
TSUKAGOSHI KAZUHITO
AOYAGI YOSHINOBU
OKINAKA MOTOKI
TSUKAGOSHI KAZUHITO
AOYAGI YOSHINOBU
International Classes:
B29C59/02; H01L21/027; (IPC1-7): H01L21/027; B29C59/02
Domestic Patent References:
| WO2004000567A1 | 2003-12-31 | |||
| WO2004021083A1 | 2004-03-11 | |||
| WO2000065408A1 | 2000-11-02 | |||
| WO2001033300A2 | 2001-05-10 |
Foreign References:
| JP2004146601A | 2004-05-20 | |||
| JP2002063741A | 2002-02-28 |
Attorney, Agent or Firm:
Ueshima, Junichi (Nishi Ikebukuro 1-chome Toshima-ku, Tokyo 21, JP)
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