FINE-PROCESSING AGENT AND FINE-PROCESSING METHOD

Title:

FINE-PROCESSING AGENT AND FINE-PROCESSING METHOD

Document Type and Number:

WIPO Patent Application WO/2010/134184

Kind Code:

A1

Abstract:

Provided is a fine-processing agent which, when fine-processing a laminated film stacked at least with a silicon dioxide film and/or a silicon nitride film, can selectively fine-process the silicon dioxide film. Also provided is a fine-processing method utilizing the fine-processing agent. The fine-processing agent is characterized by including: (a) 0.01−15.0 weight% hydrogen fluoride and/or 0.1−40.0 weight% ammonium fluoride, (b) water, and (c) 0.001−10.00 weight% water-soluble polymer selected from among a group consisting of acrylic acid, ammonium acrylate, acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and ester styrenesulfonate.

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Inventors:

MIYASHITA MASAYUKI (JP)
KUJIME TAKANOBU (JP)
NII KEIICHI (JP)

Application Number:

PCT/JP2009/059370

Publication Date:

November 25, 2010

Filing Date:

May 21, 2009

Export Citation:

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Assignee:

STELLA CHEMIFA CORP (JP)
MIYASHITA MASAYUKI (JP)
KUJIME TAKANOBU (JP)
NII KEIICHI (JP)

International Classes:

H01L21/308

Foreign References:

JP2008541447A	2008-11-20
JP2001249465A	2001-09-14
JP2005303305A	2005-10-27
JP2002134468A	2002-05-10
JP2005328067A	2005-11-24
JP2003297952A	2003-10-17
JPH1098155A	1998-04-14
JP2000022112A	2000-01-21

Other References: