Title:
FIRING FURNACE FOR FIRING ELECTRODE OF SOLAR CELL ELEMENT, METHOD FOR MANUFACTURING SOLAR CELL ELEMENT, AND SOLAR CELL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/155398
Kind Code:
A1
Abstract:
Disclosed is a firing furnace for firing an electrode of a solar cell element, which is provided with: a transfer member, which transfers a substrate having a conductive paste applied thereto; a heating section, which heats the substrate and fires the conductive paste; and a cooling section, which cools the heated substrate. The furnace is also provided with a heating means for heating the transfer member. Specifically, at the time of firing the electrode paste using the wire-type firing furnace, since a wire is fired at a temperature substantially equivalent to the ambient temperature of the heating section, deterioration of yield due to having the electrode damaged by a deposited material of the metal component of the conductive paste is suppressed, said deposited material being deposited on the wire, and the wire-type firing furnace can be continuously used.
Inventors:
MITTA Ryo (Shin-Etsu Chemical Co. Ltd., 13-1, Isobe 2-chome, Annaka-sh, Gunma 95, 〒3790195, JP)
三田 怜 (〒95 群馬県安中市磯部二丁目１３番１号 信越化学工業株式会社 精密機能材料研究所内 Gunma, 〒3790195, JP)
WATABE Takenori (Shin-Etsu Chemical Co. Ltd., 13-1, Isobe 2-chome, Annaka-sh, Gunma 95, 〒3790195, JP)
三田 怜 (〒95 群馬県安中市磯部二丁目１３番１号 信越化学工業株式会社 精密機能材料研究所内 Gunma, 〒3790195, JP)
WATABE Takenori (Shin-Etsu Chemical Co. Ltd., 13-1, Isobe 2-chome, Annaka-sh, Gunma 95, 〒3790195, JP)
Application Number:
JP2011/062755
Publication Date:
December 15, 2011
Filing Date:
June 03, 2011
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd. (6-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
信越化学工業株式会社 (〒04 東京都千代田区大手町二丁目６番１号 Tokyo, 〒1000004, JP)
MITTA Ryo (Shin-Etsu Chemical Co. Ltd., 13-1, Isobe 2-chome, Annaka-sh, Gunma 95, 〒3790195, JP)
三田 怜 (〒95 群馬県安中市磯部二丁目１３番１号 信越化学工業株式会社 精密機能材料研究所内 Gunma, 〒3790195, JP)
信越化学工業株式会社 (〒04 東京都千代田区大手町二丁目６番１号 Tokyo, 〒1000004, JP)
MITTA Ryo (Shin-Etsu Chemical Co. Ltd., 13-1, Isobe 2-chome, Annaka-sh, Gunma 95, 〒3790195, JP)
三田 怜 (〒95 群馬県安中市磯部二丁目１３番１号 信越化学工業株式会社 精密機能材料研究所内 Gunma, 〒3790195, JP)
International Classes:
H01L21/677; B65G49/00; B65G49/06; F27B9/06; F27B9/24; F27D3/12; H01L31/04
Attorney, Agent or Firm:
KOJIMA Takashi (GINZA OHTSUKA Bldg. 2F, 16-12 Ginza 2-chome, Chuo-k, Tokyo 61, 〒1040061, JP)
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Claims: