Title:
FIRING SETTER AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/092894
Kind Code:
A1
Abstract:
Provided are a firing setter and a manufacturing method for the firing setter that can prevent the occurrence of product defects due to a firing setter reacting with or scratching an object being fired. According to the present invention, the firing setter is produced by forming a thermally sprayed coating film (2) on a surface (1) whereon an object to be fired is to be placed, the thermally sprayed coating film (2) comprising a matrix material (3) made of molybdenum (Mo) or tungsten (W) in which pore-forming particles are dispersed, and the object to be fired having a substrate made of molybdenum (Mo) or tungsten (W). The pore-forming particles are made of hexagonal boron nitride (h-BN), vanadium nitride (VN), vanadium carbide (VC), or polyester and are contained so as to have an area ratio of 7.5-35% relative to the thermally sprayed coating film (2).
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Inventors:
KOYAMA MOTOTSUGU (JP)
KURASE MASAHIRO (JP)
HOTTA TOSHIO (JP)
NISHIDA FUSATOSHI (JP)
YAMAMOTO EISUKE (JP)
SHINOZAKI AKIHIRO (JP)
KURASE MASAHIRO (JP)
HOTTA TOSHIO (JP)
NISHIDA FUSATOSHI (JP)
YAMAMOTO EISUKE (JP)
SHINOZAKI AKIHIRO (JP)
Application Number:
PCT/JP2018/007457
Publication Date:
May 16, 2019
Filing Date:
February 28, 2018
Export Citation:
Assignee:
SHINWA IND (JP)
International Classes:
C23C4/067; C04B35/64
Foreign References:
| JPH02200766A | 1990-08-09 | |||
| JP2004281392A | 2004-10-07 | |||
| JP2005139554A | 2005-06-02 | |||
| JPH111757A | 1999-01-06 |
Attorney, Agent or Firm:
NARUSE Shigeo (JP)
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