FIXATION CARRIER, PRODUCTION METHOD OF FIXATION CARRIER, USE METHOD OF FIXATION CARRIER, AND SUBSTRATE RECEPTION CONTAINER

Title:

FIXATION CARRIER, PRODUCTION METHOD OF FIXATION CARRIER, USE METHOD OF FIXATION CARRIER, AND SUBSTRATE RECEPTION CONTAINER

Document Type and Number:

WIPO Patent Application WO/2006/087894

Kind Code:

A1

Abstract:

Provided are a fixation carrier capable of appropriately transporting an easily warpable and breakable article, a production method of the fixation carrier, a use method of the fixation carrier, and a substrate reception container. The fixation carrier has partitioned spaces (3) that are formed as depressions in the surface of a rigid base material (2) and are covered in a layered manner by a holding layer (8) for holding a semiconductor wafer W; projections (4) that are arranged side by side next to the partitioned spaces (3) to support the holding layer (8) in a contacting manner; and an air discharge path (6) that is provided in the base material (2) and guides air in the partitioned spaces (3), covered by the holding layer (8), to the outside. The semiconductor wafer W that is easily warpable and breakable is not directly received in a container body of the substrate reception container but received in the container body while being held by the holding layer (8) of the fixation carrier (1). As a result, the wafer W can be safely and appropriately transported to a factory.

More Like This:

JPS62193259	CASSETTE CONVEYANCE CASE
WO/2008/124421	AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES

Inventors:

ODASHIMA SATOSHI (JP)
HOSONO NORIYOSHI (JP)

Application Number:

PCT/JP2006/301352

Publication Date:

August 24, 2006

Filing Date:

January 27, 2006

Export Citation:

Click for automatic bibliography generation Help

Assignee:

SHINETSU POLYMER CO (JP)
ODASHIMA SATOSHI (JP)
HOSONO NORIYOSHI (JP)

International Classes:

H01L21/673

Foreign References:

JP2000142874A	2000-05-23
JPH05335405A	1993-12-17
JPS59227195A	1984-12-20

Other References: