Title:
FIXING DEVICE, AND DETECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/105275
Kind Code:
A1
Abstract:
Disclosed are a fixing device and a detection system. The fixing device comprises a carrier tray (10) for carrying grinding heads (20, 30), wherein the carrier tray is provided with a positioning hole (101) and a first positioning ring (102), the positioning hole being configured for accommodating and fixing a positioning pin (201) of a first type of grinding head (20), and the first positioning ring being configured for fixing a positioning tray (301) of the second type of grinding head (30). The fixing device can be used for fixing various types of grinding heads.
Inventors:
LI CHAO (CN)
KU CHIN-CHUNG (CN)
KU CHIN-CHUNG (CN)
Application Number:
PCT/CN2021/106775
Publication Date:
May 27, 2022
Filing Date:
July 16, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B24B37/27; B24B41/047; B24B49/00; H01L21/673
Foreign References:
| CN110545958A | 2019-12-06 | |||
| CN111421439A | 2020-07-17 | |||
| CN202057293U | 2011-11-30 | |||
| CN111687746A | 2020-09-22 | |||
| CN201455792U | 2010-05-12 | |||
| US20040048553A1 | 2004-03-11 | |||
| CN111745533A | 2020-10-09 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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