Title:
FLAT PANEL DISPLAY MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/055660
Kind Code:
A1
Abstract:
An alignment mark having a high accuracy and a preferable visibility can easily be formed without reforming the production line or significantly increasing the number of steps. Furthermore, a flat panel display can be manufactured with a high productivity and a low cost.
Provided is a manufacturing method including: a step for forming a photosensitive film on a substrate; a step for exposing the photosensitive film by using an exposure mask (41) so as to form an alignment mark (51); and a step for viewing the alignment mark (51) in the state prior to development of the photosensitive film so as to execute positioning.
More Like This:
Inventors:
URIU, Eiichi (())
瓜生英一 (())
TANIGUCHI, Motohiro (())
谷口基浩 (())
MURAKOSO, Tomohiro (())
村社智宏 (())
OTANI, Toshiya (())
大谷俊哉 (())
瓜生英一 (())
TANIGUCHI, Motohiro (())
谷口基浩 (())
MURAKOSO, Tomohiro (())
村社智宏 (())
OTANI, Toshiya (())
大谷俊哉 (())
Application Number:
JP2009/006035
Publication Date:
May 20, 2010
Filing Date:
November 12, 2009
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
URIU, Eiichi (())
瓜生英一 (())
TANIGUCHI, Motohiro (())
谷口基浩 (())
MURAKOSO, Tomohiro (())
村社智宏 (())
OTANI, Toshiya (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
URIU, Eiichi (())
瓜生英一 (())
TANIGUCHI, Motohiro (())
谷口基浩 (())
MURAKOSO, Tomohiro (())
村社智宏 (())
OTANI, Toshiya (())
International Classes:
H01J9/02; G03F9/00; H01J17/16; H01J17/49
Attorney, Agent or Firm:
NAITO, Hiroki et al. (1006 Oaza Kadoma, Kadoma-sh, Osaka 01, 〒5718501, JP)
Download PDF:
Previous Patent: PNEUMATIC TIRE
Next Patent: PLASMA DISPLAY DEVICE AND PLASMA DISPLAY PANEL DRIVING METHOD
Next Patent: PLASMA DISPLAY DEVICE AND PLASMA DISPLAY PANEL DRIVING METHOD