FLAT PANEL DISPLAY MANUFACTURING METHOD

Title:

FLAT PANEL DISPLAY MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2010/055660

Kind Code:

A1

Abstract:

An alignment mark having a high accuracy and a preferable visibility can easily be formed without reforming the production line or significantly increasing the number of steps. Furthermore, a flat panel display can be manufactured with a high productivity and a low cost. Provided is a manufacturing method including: a step for forming a photosensitive film on a substrate; a step for exposing the photosensitive film by using an exposure mask (41) so as to form an alignment mark (51); and a step for viewing the alignment mark (51) in the state prior to development of the photosensitive film so as to execute positioning.

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Inventors:

URIU EIICHI
TANIGUCHI MOTOHIRO
MURAKOSO TOMOHIRO
OTANI TOSHIYA
YAMAMOTO SOUJI
FUJIWARA TOSHIAKI
SESEI TAKASHI
MATSUBARA NORIYUKI

Application Number:

PCT/JP2009/006035

Publication Date:

May 20, 2010

Filing Date:

November 12, 2009

Export Citation:

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Assignee:

PANASONIC CORP (JP)
URIU EIICHI
TANIGUCHI MOTOHIRO
MURAKOSO TOMOHIRO
OTANI TOSHIYA
YAMAMOTO SOUJI
FUJIWARA TOSHIAKI
SESEI TAKASHI
MATSUBARA NORIYUKI

International Classes:

H01J9/02; G03F9/00; H01J17/16; H01J17/49

Domestic Patent References:

WO1999050893A1

1999-10-07

Foreign References:

JP2002148824A	2002-05-22
JPH01170803A	1989-07-05
JP2000330269A	2000-11-30

Other References: