Title:
FLAT-PLATE CONVEYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/148547
Kind Code:
A1
Abstract:
Air discharge means including a duct (51) for discharging cleaning air (A) to the outside of the building is installed in the following regions: a region of a manufacturing line leading to a cassette, the region being located short of the cassette in the conveyance direction; a flat-plate reception and delivery region located between the manufacturing line and the cassette; and a region which is located between work positions along the manufacturing line and in which a flat-plate conveying and driving section is installed. Facility cost and running cost are reduced using minimum required facility.
Inventors:
KOHTOKU, Yukihide (())
Application Number:
JP2011/001444
Publication Date:
December 01, 2011
Filing Date:
March 11, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
H01L21/677; B65G39/04; B65G49/06
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (Osaka-Marubeni Bldg, 5-7 Hommachi 2-chome, Chuo-ku, Osaka-sh, Osaka 53, 〒5410053, JP)
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Claims: