Title:
FLATNESS MEASUREMENT UNIT
Document Type and Number:
WIPO Patent Application WO/2021/181906
Kind Code:
A1
Abstract:
This flatness measurement unit is placed on a shelf board, is for measuring a flatness relating to the degree of deviation from a state in which four prescribed locations on the shelf board are in the same plane, and comprises a body frame and four grounded parts that are disposed so as to be distributed across the body frame and are grounded at four prescribed locations on the shelf board. The four grounded parts consist of two first grounded parts that are not at diagonal positions and two second grounded parts other than the first grounded parts. The center of gravity of the flatness measurement unit is positioned in the area, from among the four areas delimited by the two diagonal lines that pass through the first grounded parts and second grounded parts that are at diagonal positions, that includes the two first grounded parts.
Inventors:
TSUBAKI TATSUO (JP)
YOKOYAMA HIROYUKI (JP)
YOKOYAMA HIROYUKI (JP)
Application Number:
PCT/JP2021/002098
Publication Date:
September 16, 2021
Filing Date:
January 21, 2021
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
G01B5/20; G01B11/26; G01B21/30; H01L21/673; H01L21/677; H01L21/68
Domestic Patent References:
| WO2017038268A1 | 2017-03-09 |
Foreign References:
| JPH0559207U | 1993-08-06 | |||
| JP2016094265A | 2016-05-26 | |||
| JPH11108655A | 1999-04-23 | |||
| JP2018129400A | 2018-08-16 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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