Title:
FLEXIBLE ELECTRO-ACOUSTIC SUBSTRATE AND PREPARATION METHOD THEREFOR, AND FLEXIBLE ELECTRO-ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/238696
Kind Code:
A1
Abstract:
The embodiment of the present disclosure provides a flexible electro-acoustic substrate and a preparation method therefor, as well as a flexible electro-acoustic device. The preparation method for the flexible electro-acoustic substrate comprises: forming a flexible base; forming a plurality of piezoelectric components on the flexible base; and forming cavities with one-to-one correspondence to the plurality of piezoelectric components on the flexible base. The cavities are located on the side of the flexible base away from the plurality of piezoelectric components. According to the embodiment of the present disclosure, the cavities are formed in the flexible base by means of etching with good etching uniformity and no etching residue, thereby facilitating process realization and effectively eliminating the defects of low yield and complex process realization in the existing methods.
Inventors:
HAN YANLING (CN)
DONG XUE (CN)
WANG HAISHENG (CN)
LIU YINGMING (CN)
ZHAO LIJUN (CN)
GUO YUZHEN (CN)
LI PEIXIAO (CN)
JI YAQIAN (CN)
ZHANG CHENYANG (CN)
LI XIUFENG (CN)
DONG XUE (CN)
WANG HAISHENG (CN)
LIU YINGMING (CN)
ZHAO LIJUN (CN)
GUO YUZHEN (CN)
LI PEIXIAO (CN)
JI YAQIAN (CN)
ZHANG CHENYANG (CN)
LI XIUFENG (CN)
Application Number:
PCT/CN2020/091039
Publication Date:
December 03, 2020
Filing Date:
May 19, 2020
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H03H9/17; H01L41/22
Foreign References:
| CN110112284A | 2019-08-09 | |||
| CN109301061A | 2019-02-01 | |||
| CN109387235A | 2019-02-26 | |||
| CN1874147A | 2006-12-06 | |||
| EP3333676A1 | 2018-06-13 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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