Title:
FLEXIBLE SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/241718
Kind Code:
A1
Abstract:
One embodiment of a flexible sensor according to the present invention comprises a flexible substrate and a sensor element provided on the substrate. The sensor element has: a transistor having a gate electrode, a source electrode, and a drain electrode; and a variable resistor connected to any of the gate electrode, the source electrode, and the drain electrode and having a resistance value which varies in response to distortion. The variable resistor has an extension extending in one direction.
Inventors:
KOIZUMI SHOHEI (JP)
KITO YOSHIAKI (JP)
SHIMOYAMA TAKACHIKA (JP)
HATAYAMA KATSUHIRO (JP)
YAMADA KENTARO (JP)
KIUCHI TOHRU (JP)
FUKAWA YASUTERU (JP)
KITO YOSHIAKI (JP)
SHIMOYAMA TAKACHIKA (JP)
HATAYAMA KATSUHIRO (JP)
YAMADA KENTARO (JP)
KIUCHI TOHRU (JP)
FUKAWA YASUTERU (JP)
Application Number:
PCT/JP2020/021006
Publication Date:
December 03, 2020
Filing Date:
May 27, 2020
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01L1/20; G01L5/00
Domestic Patent References:
| WO2016103350A1 | 2016-06-30 |
Foreign References:
| JP2014228454A | 2014-12-08 | |||
| JP2007218906A | 2007-08-30 | |||
| JPH0868704A | 1996-03-12 | |||
| JP2018200280A | 2018-12-20 | |||
| US20170194427A1 | 2017-07-06 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF: