Title:
FLEXIBLE SUBSTRATE OF FLEXIBLE OLED DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/033578
Kind Code:
A1
Abstract:
Provided is a manufacturing method of a flexible substrate of an OLED display panel, comprising the following steps: S10, providing a first polyimide layer (201); S20, manufacturing a first silicon oxide layer (202) on a surface of the first polyimide layer (201); S30, manufacturing a second silicon oxide layer (203) on a surface of the first silicon oxide layer (202); S40, manufacturing an amorphous silicon layer (204) on a surface of the second silicon oxide layer (203); and S50, manufacturing a second polyimide layer (205) on a surface of the amorphous silicon layer (204).
Inventors:
XU BIN (CN)
Application Number:
PCT/CN2017/109090
Publication Date:
February 21, 2019
Filing Date:
November 02, 2017
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L51/52; H01L51/56
Foreign References:
| CN104167424A | 2014-11-26 | |||
| CN106340523A | 2017-01-18 | |||
| CN102664196A | 2012-09-12 | |||
| CN105789473A | 2016-07-20 | |||
| CN105845844A | 2016-08-10 | |||
| US20020140347A1 | 2002-10-03 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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