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Title:
FLEXIBLE VACUUM ULTRAVIOLET IONIZER FOR VACUUM CHAMBER
Document Type and Number:
WIPO Patent Application WO/2023/177258
Kind Code:
A1
Abstract:
The present invention relates to a flexible vacuum ultraviolet ionizer for a vacuum chamber, having a flexible cable that can be inserted into a vacuum chamber and, more specifically, to a flexible vacuum ultraviolet ionizer for a vacuum chamber, the ionizer using a vacuum ultraviolet lamp provided in a vacuum chamber, and comprising: a head part including a heavy hydrogen lamp for emitting vacuum ultraviolet rays within the vacuum chamber; a connector part which is coupled to the head part, and which enables the emission direction of the vacuum ultraviolet rays of the head part to be bent at any angle toward an object to be electrified; and a high voltage generation part which is coupled to the connector part, and which is provided at one inner side thereof so as to apply high voltage to the vacuum ultraviolet lamp.

Inventors:
LEE DONG HOON (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
PARK JIN CHOL (KR)
JUNG DONG GIL (KR)
HEO SI HWAN (KR)
LIM JI HYUNG (KR)
Application Number:
PCT/KR2023/003587
Publication Date:
September 21, 2023
Filing Date:
March 17, 2023
Export Citation:
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Assignee:
SUNJE HI TEK CO LTD (KR)
International Classes:
H05F3/00; H01J61/02; H05B41/36
Foreign References:
JP2007012467A2007-01-18
KR100539359B12005-12-27
KR20120033290A2012-04-06
KR20100024886A2010-03-08
JP2004304123A2004-10-28
Attorney, Agent or Firm:
KWAK, Chul Keun (KR)
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