FLOATING MODE ION SOURCE - GUARDIAN INDUSTRIES

Title:

FLOATING MODE ION SOURCE

Document Type and Number:

WIPO Patent Application WO2005024880

Kind Code:

A3

Abstract:

A cold-cathode closed-drift ion source includes an anode (25), a cathode (5) and a power supply. In certain example embodiments, neither the positive nor negative terminals of the power supply are connected to ground (GND), and the anode (25) and cathode (5) are also not connected to ground (GND). Thus, the ion source operates in a floating mode. As a result, the likelihood of formation of a problematic secondary circuit from the source to the power supply through the walls (50) can be reduced and/or eliminated (or suppressed). Therefore, the chance of drawing a net positive charge from the ion source which induces a positive charge on dielectric or other surfaces proximate the wall(s) (50) can be suppressed and/or reduced.

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Inventors:

PETRMICHL RUDOLPH HUGO (US)

Application Number:

PCT/US2004/028922

Publication Date:

December 22, 2005

Filing Date:

September 03, 2004

Export Citation:

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Assignee:

GUARDIAN INDUSTRIES (US)
PETRMICHL RUDOLPH HUGO (US)

International Classes:

H01J27/00; H01J27/02; H01J37/08; H01J49/10; H01J; (IPC1-7): H01J49/10; H01J27/02

Foreign References:

US5969470A	1999-10-19
US5457298A	1995-10-10
US6664739B1	2003-12-16

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