Title:
FLOW ADJUSTMENT MECHANISM, DILUTED DRUG SOLUTION SUPPLY MECHANISM, LIQUID TREATMENT DEVICE, AND OPERATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2015/064657
Kind Code:
A1
Abstract:
In one form, this flow adjustment mechanism (208) is provided with a first flow adjustment device (208A) and a second flow adjustment device (208B) which are provided in series in that order from the upstream side in a liquid line (202). If the second flow adjustment device is fully opened, then the first flow adjustment device is adjusted to a prescribed opening degree such that the flow of the liquid in the liquid line is a prescribed multiple of a preconfigured flow. In a state in which the opening degree of the first flow adjustment device has been adjusted to the aforementioned prescribed opening degree, the second flow adjustment device is adjusted to an opening degree such that the flow of the liquid in the liquid line is the aforementioned preconfigured flow rate is obtained.
Inventors:
AMIYA MICHITAKA (JP)
SATOH TAKAMI (JP)
ESHIMA KAZUYOSHI (JP)
NAKAMURA AKIHIRO (JP)
TANAKA KOJI (JP)
KOSAI KAZUKI (JP)
SATOH TAKAMI (JP)
ESHIMA KAZUYOSHI (JP)
NAKAMURA AKIHIRO (JP)
TANAKA KOJI (JP)
KOSAI KAZUKI (JP)
Application Number:
PCT/JP2014/078808
Publication Date:
May 07, 2015
Filing Date:
October 29, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/304; H01L21/027
Foreign References:
| JP2011176118A | 2011-09-08 | |||
| JP2006278655A | 2006-10-12 | |||
| JP2003120606A | 2003-04-23 | |||
| JP2010232520A | 2010-10-14 | |||
| JP2011125857A | 2011-06-30 |
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)
Katsunuma Hirohito (JP)
Download PDF: