Title:
FLOW CANNEL MEMBER, HEAT EXCHANGER PROVIDED WITH FLOW CHANNEL MEMBER, AND SEMICONDUCTOR MANUFACTURING APPARATUS PROVIDED WITH FLOW CHANNEL MEMBER
Document Type and Number:
WIPO Patent Application WO/2013/147037
Kind Code:
A1
Abstract:
[Problem] To provide: a flow channel member, which has high electrical reliability, and which can suppress generation of electrostatic discharge, even if an electrostatically charged fluid flowed into the flow channel member; and a heat exchanger and a semiconductor manufacturing apparatus, which are provided with the flow channel member.
[Solution] A flow channel member (1) has a flow channel (4) in a base body composed of ceramic, said flow channel being provided with a flow-in port and a flow-out port, and the flow channel (4) has, at least at a part thereof, a low-resistance portion having a surface resistance value less than 1×107 Ω/sq. With the flow channel member, even if the fluid supplied to the flow channel (4) has been electrostatically charged during a period of time before being supplied to the flow channel, static electricity can be removed by means of the low-resistance portion, and the electrostatic discharge can be suppressed, and the flow channel member having high electrical reliability can be provided.
Inventors:
SEKIGUCHI KEIICHI (JP)
FUJIO KAZUHIKO (JP)
ISHIMINE YUUSAKU (JP)
FUJIO KAZUHIKO (JP)
ISHIMINE YUUSAKU (JP)
Application Number:
PCT/JP2013/059293
Publication Date:
October 03, 2013
Filing Date:
March 28, 2013
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; F28F21/04
Foreign References:
JP2010265121A | 2010-11-25 | |||
JP2001257253A | 2001-09-21 | |||
JPH11297339A | 1999-10-29 | |||
JP2005032858A | 2005-02-03 | |||
JP2006253703A | 2006-09-21 | |||
JP2007043042A | 2007-02-15 | |||
JP2010238909A | 2010-10-21 | |||
JP2011151336A | 2011-08-04 | |||
JP2010034510A | 2010-02-12 | |||
JP2008016487A | 2008-01-24 |
Other References:
See also references of EP 2833396A4
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