FLOW CONTROL METHOD FOR CLUSTERING FLUID AND FLOW CONTROL DEVICE FOR CLUSTERING FLUID

Title:

FLOW CONTROL METHOD FOR CLUSTERING FLUID AND FLOW CONTROL DEVICE FOR CLUSTERING FLUID

Document Type and Number:

WIPO Patent Application WO/2004/066048

Kind Code:

A1

Abstract:

A pressure-type flow control device is used to permit a high-accuracy control of the flow rate of a clustering fluid such as HF gas to be supplied to a vacuum chamber or the like within a flow rate range of about 3-300 SCCM. Specifically, a method of controlling the flow rate of a clustering fluid that uses a pressure-type flow control device where a flow rate Q of a gas flowing through an orifice is computed as Q=KP₁ (K is constant) with a ratio P₂/P₁ between an orifice-upstream-side gas pressure P₁ and a downstream-side gas pressure P₂ kept up to the critical pressure ratio of the gas, wherein the pressure-type flow control device is heated to at least 40°C, or the clustering fluid is added with a dilute gas to be kept at up to a partial pressure, thereby allowing the clustering fluid, produced by dissociating the association of molecules and then keeping them in a monomolecular state, to flow through the orifice.

Inventors:

OHMI TADAHIRO (JP)
SUGIYAMA KAZUHIKO (JP)
MIZUSAWA KENETU (JP)
TAKAHASHI EIJI (JP)
UNO TOMIO (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NAGASE MASAAKI (JP)

Application Number:

PCT/JP2004/000346

Publication Date:

August 05, 2004

Filing Date:

January 16, 2004

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIKIN KK (JP)
OHMI TADAHIRO (JP)
TOKYO ELECTRON LTD (JP)
SUGIYAMA KAZUHIKO (JP)
MIZUSAWA KENETU (JP)
TAKAHASHI EIJI (JP)
UNO TOMIO (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NAGASE MASAAKI (JP)

International Classes:

G05D7/06; (IPC1-7): G05D7/06

Foreign References:

EP1026566A1	2000-08-09
JPH0184022U	1989-06-05
JPH11265214A	1999-09-28
US6063451A	2000-05-16

Other References: