Title:
FLOW CONTROL VALVE AND MASS FLOW CONTROL DEVICE IN WHICH SAME IS USED
Document Type and Number:
WIPO Patent Application WO/2018/062516
Kind Code:
A1
Abstract:
Provided is a flow control valve comprising: a valve seat, which has an internal cylinder part having a closed surface on the upper end thereof, and an external cylinder part having a greater height than does the internal cylinder part; and a valve body that opens and closes in a direction perpendicular to the closed surface of the valve seat, wherein the internal cylinder part and the external cylinder part are configured from an internal cylinder member and an external cylinder member, which are separate members fitted together in an airtight manner. This makes it possible for the closed surface of the internal cylinder part to be machined smoothly, and for the flow rate of gas in a small flow rate range to be more accurately controlled by the flow control valve than in the past. The arithmetic average roughness of the closed surface of the valve seat is preferably no more than 100 nm.
Inventors:
SASAKI RYU (JP)
IWAYOSHI RYOUICHI (JP)
IWAYOSHI RYOUICHI (JP)
Application Number:
PCT/JP2017/035574
Publication Date:
April 05, 2018
Filing Date:
September 29, 2017
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
F16K1/42; F16K7/16; G05D7/00
Foreign References:
| JP2015175394A | 2015-10-05 | |||
| US2692750A | 1954-10-26 | |||
| US3952994A | 1976-04-27 | |||
| JP2006283967A | 2006-10-19 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
Download PDF:
Previous Patent: PRECOATED METAL SHEET
Next Patent: ELECTROCONDUCTIVE FILM, TOUCH PANEL, AND IMAGE DISPLAY DEVICE
Next Patent: ELECTROCONDUCTIVE FILM, TOUCH PANEL, AND IMAGE DISPLAY DEVICE