Title:
FLOW CONTROLLER AND ITS REGULATION METHOD
Document Type and Number:
WIPO Patent Application WO/2005/124492
Kind Code:
A1
Abstract:
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal, and comprises a means (18) for controlling the flow rate control valve mechanism based on an external flow rate setting signal and the flow rate signal. The flow channel is provided with a test valve section (42) for opening/closing the channel, a test tank section (44) having a specified capacity, and a means (46) for detecting the fluid pressure and outputting a pressure detection signal. A test control means (48) controls mass flow rate test operation to be carried out using the test valve, the test tank section and the pressure detecting means.
Inventors:
Tanaka, Makoto c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Suzuki, Shigehiro c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Suzuki, Shigehiro c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Application Number:
PCT/JP2005/011684
Publication Date:
December 29, 2005
Filing Date:
June 20, 2005
Export Citation:
Assignee:
HITACHI METALS, LTD. (2-1 Shibaura 1-chome, Minato-ku Tokyo, 14, 10586, JP)
Tanaka, Makoto c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Suzuki, Shigehiro c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Tanaka, Makoto c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
Suzuki, Shigehiro c/o Hitachi, Metals (LTD. KUWANA WORKS 2, Daifuk, Kuwana-shi Mie 11, 51185, JP)
International Classes:
G01F1/684; G01F5/00; G01F25/00; G05D7/06; G05D16/00; G01F1/684; G01F5/00; G01F25/00; G05D7/06; G05D16/00; (IPC1-7): G05D16/00; G01F25/00
Attorney, Agent or Firm:
TOKKYO GYOMUHOJIN MEISEI INTERNATIONAL PATENT FIRM (Mitsui-Sumitomo Bank Bldg, 7th floor 18-19, Nishiki 2-chome, Naka-k, Nagoya-shi Aichi 03, 46000, JP)
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