Title:
FLOW CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2011/048896
Kind Code:
A1
Abstract:
A flow controller (10) includes a flow detection unit (14) that is provided with a detection unit (12) for detecting the flow rate of a fluid; and a flow control unit (18) that is coupled to the flow detection unit (14) and that is capable of adjusting the flow rate of the fluid. The detection sensor (38) constituting the detection unit (12) comprises a thermal flow sensor using MEMS technology, and the flow rate of the fluid that has been detected by the detection sensor (38) is output to a control unit (24). In addition, in the flow control unit (18), the supply state of air to a supply room (84) is switched by each of a supply-use solenoid valve (92) and an exhaust-use solenoid valve (94), and on the basis of the supply state of the air, a control valve (58) opens and closes.
Inventors:
SAKASEGAWA TAKESHI (JP)
OSHIMA YUTA (JP)
OSHIMA YUTA (JP)
Application Number:
PCT/JP2010/066034
Publication Date:
April 28, 2011
Filing Date:
September 16, 2010
Export Citation:
Assignee:
SMC KK (JP)
SAKASEGAWA TAKESHI (JP)
OSHIMA YUTA (JP)
SAKASEGAWA TAKESHI (JP)
OSHIMA YUTA (JP)
International Classes:
G05D7/06; G01F1/00; G01F1/692; G05D7/03
Foreign References:
| JP2002181594A | 2002-06-26 | |||
| JPS61173319A | 1986-08-05 | |||
| JPS6320605A | 1988-01-28 | |||
| JPH09101827A | 1997-04-15 |
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
Takehiro Chiba (JP)
Takehiro Chiba (JP)
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