Title:
FLOW METER AND FLOW CONTROL DEVICE PROVIDED THEREWITH
Document Type and Number:
WIPO Patent Application WO/2015/064050
Kind Code:
A1
Abstract:
The purpose of this invention is to provide a flow meter and a flow control device that make it possible to expand the range over which a flow rate can be monitored and increase the precision with which said flow rate can be monitored and/or controlled. This flow meter and flow control device are provided with the following: a high-flow-rate measurement unit that calculates a flow rate using the volume of a channel from the exit side of an entrance-side on-off switching valve (PV1) to the entrance side of a control valve (CV) as a build-down volume; and a low-flow-rate measurement unit that calculates a flow rate using the volume of the channel from the exit side of an exit-side switching valve (PV2) to the entrance side of the control valve (CV) as the aforementioned build-down volume.
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Inventors:
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
HIDAKA ATSUSHI (JP)
SUGITA KATSUYUKI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
HIDAKA ATSUSHI (JP)
SUGITA KATSUYUKI (JP)
Application Number:
PCT/JP2014/005322
Publication Date:
May 07, 2015
Filing Date:
October 21, 2014
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06; G01F1/34
Domestic Patent References:
| WO2013179550A1 | 2013-12-05 | |||
| WO2014156042A1 | 2014-10-02 |
Foreign References:
| JPS534570A | 1978-01-17 | |||
| JP2005056031A | 2005-03-03 | |||
| JP2004246825A | 2004-09-02 | |||
| JPH07281760A | 1995-10-27 | |||
| JP2011510404A | 2011-03-31 |
Attorney, Agent or Firm:
TANIDA, Ryuichi et al. (JP)
Ryuichi Yata (JP)
Ryuichi Yata (JP)
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