Title:
FLOW PATH STRUCTURE AND TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/012267
Kind Code:
A1
Abstract:
A flow path structure according to an embodiment is provided with a member. The member has an outer surface and is provided with a plurality of first paths open to the outer surface. At the time of discharging fluid from the plurality of first paths, the fluid is discharged from each of the plurality of first paths in the direction in which the fluid hits the fluid discharged from at least one of the remaining plurality of first paths.
Inventors:
KATO SHIGUMA (JP)
TERADA TAKAHIRO (JP)
HIGASHI SHINYA (JP)
TANAKA MASAYUKI (JP)
DEURA KAORI (JP)
TERADA TAKAHIRO (JP)
HIGASHI SHINYA (JP)
TANAKA MASAYUKI (JP)
DEURA KAORI (JP)
Application Number:
PCT/JP2017/023421
Publication Date:
January 18, 2018
Filing Date:
June 26, 2017
Export Citation:
Assignee:
TOSHIBA KK (JP)
International Classes:
H01L21/205; C23C16/455; H01L21/31
Domestic Patent References:
| WO2010058813A1 | 2010-05-27 | |||
| WO2013051248A1 | 2013-04-11 |
Foreign References:
| JPS62123721A | 1987-06-05 | |||
| US20040003777A1 | 2004-01-08 | |||
| JP2009038209A | 2009-02-19 | |||
| JP2014070249A | 2014-04-21 | |||
| JPH09186140A | 1997-07-15 | |||
| JP2003243365A | 2003-08-29 | |||
| JP2015134943A | 2015-07-27 | |||
| JP2006237093A | 2006-09-07 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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