Title:
FLOW RATE CALCULATING SYSTEM, INTEGRATED GAS PANEL DEVICE, AND BASE PLATE
Document Type and Number:
WIPO Patent Application WO/2011/040268
Kind Code:
A1
Abstract:
Provided is a compact, space-saving, and resource-saving mass flowmeter or integrated gas panel device including a plurality of measuring lines having, for example, diaphragm pressure sensors. Pressure sensors (PS1, PS2) are alternately disposed on measuring lines (L1 to L4) adjacent to each other along a flow channel direction when the measuring lines (L1 to L4) are viewed from above, and at the same time, overlap with each other when viewed along the flow channel direction shown in the top view.
Inventors:
YASUDA, Tadahiro (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
安田 忠弘 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
HATAITA, Takehisa (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
畑板 剛久 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
安田 忠弘 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
HATAITA, Takehisa (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
畑板 剛久 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
Application Number:
JP2010/066185
Publication Date:
April 07, 2011
Filing Date:
September 17, 2010
Export Citation:
Assignee:
HORIBA STEC, Co., Ltd. (11-5, Hokodate-cho Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
株式会社堀場エステック (〒16 京都府京都市南区上鳥羽鉾立町１１番５ Kyoto, 〒6018116, JP)
YASUDA, Tadahiro (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
安田 忠弘 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
HATAITA, Takehisa (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
株式会社堀場エステック (〒16 京都府京都市南区上鳥羽鉾立町１１番５ Kyoto, 〒6018116, JP)
YASUDA, Tadahiro (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
安田 忠弘 (〒16 京都府京都市南区上鳥羽鉾立町１１番５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
HATAITA, Takehisa (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
International Classes:
G01F1/36; F16L55/00; G01L19/00
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (3F Karasumanijyo Bldg, 267 Makieya-cho, Nijyo-agaru, Karasuma-dori, Nakagyo-ku, Kyoto-cit, Kyoto 57, 〒6040857, JP)
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