Title:
FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW RATE CONTROL DEVICE, FLOW RATE MEASURING DEVICE, AND METHOD OF MEASURING FLOW RATE USING FLOW RATE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/008420
Kind Code:
A1
Abstract:
In a method of calibrating a flow rate control device in which flow rate calibration is performed on the basis of a comparison with a flow rate measured using a flow rate reference apparatus, a prescribed permitted error range is set with respect to a plurality of flow rate settings, and the permitted error range of at least one specific flow rate setting from among the plurality of flow rate settings is set to be smaller than the prescribed permitted error range.
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Inventors:
SAWADA YOHEI (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2017/023013
Publication Date:
January 11, 2018
Filing Date:
June 22, 2017
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G01F25/00; G01F1/00; G01F1/34; G01F1/42
Domestic Patent References:
| WO2002033361A2 | 2002-04-25 |
Foreign References:
| JP2011064707A | 2011-03-31 | |||
| JP2002540415A | 2002-11-26 | |||
| JP2015058059A | 2015-03-30 | |||
| JP2014063348A | 2014-04-10 | |||
| JPH0934556A | 1997-02-07 | |||
| JP2002296096A | 2002-10-09 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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