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Patent Searching and Data


Title:
FLOW RATE CONTROL DEVICE AND FLOW RATE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2019/163676
Kind Code:
A1
Abstract:
A flow rate control device 100 is equipped with: a control valve 6 that is provided in a flow channel 1; flow rate measuring units 2, 3 that measure fluid flow rates controlled by the control valve 6; and a controller 7. The controller 7 is configured so as to control the opening/closing operations of the control valve 6 so that a target integrated flow rate Vs and a measured integrated flow rate (Vn+Vd) based on signals outputted from the flow rate measuring units match.

Inventors:
SUGITA KATSUYUKI (JP)
NISHINO KOUJI (JP)
YASUMOTO NAOFUMI (JP)
HIRATA KAORU (JP)
OGAWA SHINYA (JP)
IDEGUCHI KEISUKE (JP)
Application Number:
JP2019/005638
Publication Date:
August 29, 2019
Filing Date:
February 15, 2019
Export Citation:
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Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Foreign References:
JP2002310773A2002-10-23
JP4197648B22008-12-17
JP2017215726A2017-12-07
JP2009265988A2009-11-12
Attorney, Agent or Firm:
TANIDA Ryuichi (JP)
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