Title:
FLOW-RATE CONTROL DEVICE AND FLOW-RATE CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2015/030097
Kind Code:
A1
Abstract:
This flow-rate control unit comprises: a sensor model storage unit; a flow-rate simulation value output unit that outputs a flow-rate simulation value which is a flow-rate value that is output by the sensor model when a flow-rate setting value is input; a feedback control unit that outputs a flow-rate feedback value on the basis of a deviation between a flow-rate measurement value and the flow-rate simulation value; and a valve control unit that controls a valve application voltage to be applied to a valve on the basis of the flow-rate feedback value and a flow-rate feedforward value calculated from the flow-rate setting value. The flow-rate simulation value output unit is configured so as to output the flow-rate simulation value in a state where there is a predetermined time delay with respect to the flow-rate setting value.
Inventors:
TAKIJIRI KOTARO (JP)
SHIMIZU KEITA (JP)
SHIMIZU KEITA (JP)
Application Number:
PCT/JP2014/072540
Publication Date:
March 05, 2015
Filing Date:
August 28, 2014
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
G05D7/06; G05B11/32; G05B11/36
Foreign References:
| JPH07271447A | 1995-10-20 | |||
| JPS62219001A | 1987-09-26 | |||
| JPH05113825A | 1993-05-07 | |||
| JPH09171412A | 1997-06-30 | |||
| JPH10232714A | 1998-09-02 | |||
| JP2009543229A | 2009-12-03 | |||
| JP2009535716A | 2009-10-01 | |||
| US20110054702A1 | 2011-03-03 |
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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