Title:
FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/150331
Kind Code:
A1
Abstract:
This flow rate control device includes: a control valve; a first flow path provided on the downstream side of the control valve; a second flow path; and an expansion chamber provided between the first flow path and the second flow path. The second flow path is provided at a position that is different from a position on the extension of the first flow path.
Inventors:
HIRAI TOURU (JP)
MOPISAKI KAZUYUKI (JP)
HIRATA KAORU (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
MOPISAKI KAZUYUKI (JP)
HIRATA KAORU (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2017/006819
Publication Date:
September 08, 2017
Filing Date:
February 23, 2017
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06; F16K7/14
Foreign References:
| JP2013228950A | 2013-11-07 | |||
| JP2010218571A | 2010-09-30 | |||
| JP2011226513A | 2011-11-10 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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