Title:
FLOW RATE CONTROL METHOD AND FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/208417
Kind Code:
A1
Abstract:
Provided is a flow rate control method designed to be carried out by a flow rate control device 100 comprising a first control valve 6 disposed on a flow path, a second control valve 8 disposed downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising: (a) a step for closing the opening of the first control valve from a state in which, while the opening of the first control valve is being controlled on the basis of the output of the pressure sensor such that the first flow rate is achieved, the second control valve is kept open and a fluid is allowed to flow at the first flow rate; and (b) a step for, on the basis of the output of the output sensor, controlling the residual pressure downstream of the first control valve by adjusting the opening of the second control valve, and allowing the fluid to flow downstream of the second control valve at a second flow rate.
Inventors:
HIRATA KAORU (JP)
OGAWA SHINYA (JP)
SUGITA KATSUYUKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
OGAWA SHINYA (JP)
SUGITA KATSUYUKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2019/016763
Publication Date:
October 31, 2019
Filing Date:
April 19, 2019
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Foreign References:
| JP2015530668A | 2015-10-15 | |||
| JP2018018351A | 2018-02-01 | |||
| JP2015087110A | 2015-05-07 | |||
| JP2013508825A | 2013-03-07 | |||
| JP2002341947A | 2002-11-29 |
Attorney, Agent or Firm:
TANIDA Ryuichi (JP)
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