FLOW RATE CONTROL VALVE FOR FLOW RATE CONTROL DEVICE

WIPO Patent Application WO/2014/156043

A1

By being designed to simplify and reduce the size of the structure of a piezoelectric element-driven metal diaphragm control valve to be used in flow rate control devices, etc. and to simplify assembly and maintenance thereof, the present invention makes it possible to respond to the demand for more types of supply gases and supply circuits without causing increases in the size of integrated gas supply units for semiconductor-manufacturing devices, etc. The present invention is obtained from: a main valve body (1), which is equipped with a valve chamber hole (1a) that is open at the upper end and has a valve seat (6), and a fluid inlet path (7a) and a fluid outlet path (7b) communicating with same; an inverted dish-shaped metal diaphragm valve body (2), which is disposed above the valve seat (6) facing same and the outer circumferential edge of which is fixed to the bottom surface of the valve chamber hole (1a); a pressing screw (5), which is screwed into the valve chamber hole (1a) to press and fix the outer circumferential edge of the metal diaphragm valve body (2); a lower support cylinder (22), which passes through the inside of the pressing screw (5) and is inserted into the valve chamber hole (1a), is provided with a diaphragm press (3) below the bottom wall of the tip, and is provided with rectangular notches (22a) extending from the upper end to the middle of the side walls so as to pass through the side walls; a cylindrical upper support cylinder (21), which is screwed onto the upper end of the lower support cylinder (22) to form a support cylinder (23); a disc spring cradle (8) loaded on the bottom wall of the lower support cylinder (22) and having a holder section (8a); a disc spring (18) loaded on the disc spring cradle (8); a support frame (16), which is inserted in the notches (22a) of the lower support cylinder (22) and disposed horizontally, which has, at the center, a disc spring cradle guiding hole (19) for holding the tip of the disc spring holder section (8a), and which is provided with bolt insertion holes (20) at both ends; a lower cradle (9) loaded above the disc spring cradle guiding hole (19) of the support frame (16); a piezoelectric element (10) inserted inside the support cylinder (23) above the lower cradle (9); a guide (24), which is provided with a guide tube (24a) and flanges (24c) protruding from the lower end thereof to both sides, which is for inserting the support cylinder (23) inside the guide tube (24a) so as to allow vertical movement, and the flanges (24c) of which are made to face the two ends of the support frame (16) and are fixed to the main valve body (1) together with the support frame (16) using fixing bolts (17); and a positioning nut (12) screwed onto the upper end of the upper support cylinder (21). The support cylinder (23) is pushed upward by the expansion of the piezoelectric element (10) and the metal diaphragm valve body (2) is separated from the valve seat (6) by the elastic force of the metal diaphragm valve body.

HIROSE TAKASHI (JP)
YAMAJI MICHIO (JP)
YOSHIDA TOSHIHIDE (JP)
SHIGYOU KOHEI (JP)

PCT/JP2014/001505

October 02, 2014

March 17, 2014

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FUJIKIN KK (JP)

F16K31/02; F16K27/02

JP2000205428A	2000-07-25
JPH09100930A	1997-04-15
JP2001153250A	2001-06-08
JPH11353030A	1999-12-24
JPH0434275A	1992-02-05

TANIDA, Ryuichi et al. (JP)
Ryuichi Yata (JP)

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