Title:
FLOW RATE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/100433
Kind Code:
A1
Abstract:
A flow rate sensor (22) has a sensor substrate (70) and a diaphragm-like sensor diaphragm section (80) laid over the surface of the sensor substrate. The sensor diaphragm section (80) has a heater section (91) for heating the sensor diaphragm section, and also has temperature detecting sections (92, 93) for detecting the temperature of the sensor diaphragm section. The dimensions of the heater section and the temperature detecting section satisfy the relationships of formula 1 expressed by 240 < LH × t1 × (LM1 - LM2 + 1) < 2400 and formula 2 expressed by LM1 ≥LM2, where LH is the length of the heater section, LM1 is the length of inner edge sections (92a, 93a) which are edge sections of the temperature detecting sections, the edge sections being located on the side of the heater section, LM2 is the length of outer edge sections (92b, 93b) which are edge sections of the temperature detecting sections, the edge sections being located on the side opposite the heater section, and t1 is the thickness of the heater section.
Inventors:
YAMAGUCHI JUNZO (JP)
Application Number:
PCT/JP2019/037150
Publication Date:
May 22, 2020
Filing Date:
September 23, 2019
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01F1/684; G01F1/692
Foreign References:
| JP2012032247A | 2012-02-16 | |||
| JPS6188532A | 1986-05-06 | |||
| JPH04102023A | 1992-04-03 | |||
| JPH0493768A | 1992-03-26 |
Attorney, Agent or Firm:
JIN Shunji (JP)
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