Title:
FLOW RATE MEASURING MECHANISM AND MASS FLOW CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2011/040409
Kind Code:
A1
Abstract:
A pressure type flow rate measuring mechanism, having a short internal flow path obtained using a small number of parts while maintaining the mechanism compact. A flow rate measuring mechanism (10) is provided with: a body (1) having an internal flow path (1a) through which fluid to be measured flows; a fluid resistance member (3) for dividing the internal flow path (1a) and having a resistance flow path (3a) for connecting the divided portions of the internal flow path (1a); and a fluid measuring device (21) for detecting the physical quantity relating the flow rate of the fluid, and the flow rate measuring mechanism (10) is configured so that the mechanism can calculate the flow rate of the fluid on the basis of the physical quantity detected by the fluid measuring device (21). A communication path (3c) is formed in the flow resistance member (3) so as to penetrate therethrough, and the flow resistance member (3) is configured to be provided between the body (1) and the fluid measuring device (21). With the flow resistance member (3) provided in this state, one of the portions of the internal flow paths (1a) and the introduction opening (2a1) which is provided to the fluid measuring device (21) are communicated with each other through the communication path (3c), and the other portion of the internal flow paths (1a) and the communication path (3c) are communicated with each other through the resistance flow path (3a).
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Inventors:
HAYASHI SHIGEYUKI (JP)
Application Number:
PCT/JP2010/066848
Publication Date:
April 07, 2011
Filing Date:
September 28, 2010
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
HAYASHI SHIGEYUKI (JP)
HAYASHI SHIGEYUKI (JP)
International Classes:
G01F1/48; G01F1/00; G01F1/684; G05D7/06
Domestic Patent References:
| WO2003100358A1 | 2003-12-04 | |||
| WO2006137404A1 | 2006-12-28 |
Foreign References:
| JPH0222647Y2 | 1990-06-19 | |||
| JPH0863235A | 1996-03-08 |
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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