Title:
FLOW RATE SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/057176
Kind Code:
A1
Abstract:
The present flow rate sensor (1) is provided with a heating resistor (40) and a plurality of temperature detectors (30-33), and detects the flow rate of a fluid flowing over the temperature detectors (30-33) on the basis of temperature detection results of each of the temperature detectors (30-33), in a state in which the heating resistor (40) has been heated. This flow rate sensor (1) has: a frame-shaped semiconductor substrate provided with an opening; a diaphragm section (20) provided on the semiconductor substrate; and the heating resistor (40) and the temperature detectors (30-33) provided to the diaphragm section (20). The diaphragm section (20) is provided with a thin film structure (20t) for closing the opening, and in a plan view, the thin film structure (20t) has the plurality of temperature detectors (30-33) disposed around the heating resistor (40).
Inventors:
HASEKO YOSHIHIRO (JP)
YAMAMOTO YOTA (JP)
YAMAMOTO YOTA (JP)
Application Number:
PCT/JP2016/077980
Publication Date:
April 06, 2017
Filing Date:
September 23, 2016
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD (JP)
HASEKO YOSHIHIRO (JP)
YAMAMOTO YOTA (JP)
HASEKO YOSHIHIRO (JP)
YAMAMOTO YOTA (JP)
International Classes:
G01F1/692
Foreign References:
| JP2004061412A | 2004-02-26 | |||
| JP2006162423A | 2006-06-22 | |||
| JP2010085171A | 2010-04-15 | |||
| JPH11330051A | 1999-11-30 |
Other References:
See also references of EP 3339816A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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