Title:
FLOW RATE VERIFICATION UNIT
Document Type and Number:
WIPO Patent Application WO/2016/072451
Kind Code:
A1
Abstract:
A flow rate verification unit that uses the pressure fluctuation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part 2 attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve.
Inventors:
SHIROYAMA NAOYA (JP)
SUGINO AKIHITO (JP)
ITO MINORU (JP)
SUGINO AKIHITO (JP)
ITO MINORU (JP)
Application Number:
PCT/JP2015/081168
Publication Date:
May 12, 2016
Filing Date:
November 05, 2015
Export Citation:
Assignee:
CKD CORP (JP)
International Classes:
G01F25/00; G05D7/06
Foreign References:
| JP2006337346A | 2006-12-14 | |||
| JP2011064707A | 2011-03-31 | |||
| JP2012141254A | 2012-07-26 |
Attorney, Agent or Firm:
COSMOS PATENT OFFICE (JP)
Patent business corporation cosmos patent firm (JP)
Patent business corporation cosmos patent firm (JP)
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