FLOW REGULATING VALVE AND MASS FLOW CONTROLLER

WIPO Patent Application WO/2011/040330

A1

Provided is a flow regulating valve (4) wherein the number of components are small, the components can be easily assembled, the size can be easily reduced, and problems such as an insulation failure tend not to occur. A valve body member (41) is comprised of a cylindrical housing (411a), a diaphragm member (411b) functioning as an elastically deformable valve body integrally formed with the housing (411a) so as to close one end surface of the housing, an extendable piezoelectric element (412) having a tip end disposed so as to abut with the inner surface of the diaphragm member (411b), a retractable rod (411c.2) attached to the other end of the housing (411a) so as to be retractable in a direction identical to the direction that the piezoelectric element (412) is extended or contracted, and a deformable airtight maintaining member (411c.3) which is provided further inside the housing than the retractable rod so that the airtightness within the housing is maintained. The retractable rod abuts with the piezoelectric element via the airtight maintaining member, to adjust the position of the piezoelectric rod.

JPH0226387	VALVE DEVICE
JPS5954872	CIRCULATING QUANTITY CONTROL DEVICE
JPS5933794	[Title of the Invention] Opening-and-closing methods, such as an electric motor operated valve

HAYASHI SHIGEYUKI (JP)

PCT/JP2010/066553

April 07, 2011

September 24, 2010

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HORIBA STEC CO LTD (JP)
HAYASHI SHIGEYUKI (JP)

F16K31/02; F16K7/16; G05D7/06

WO2008129783A1

2008-10-30

JPH11270699A	1999-10-05
JPH0276859U	1990-06-13
JPH02116071U	1990-09-17
JP2000197374A	2000-07-14

NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)

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