Title:
FLOW SENSOR SIGNAL CONVERSION
Document Type and Number:
WIPO Patent Application WO2004088256
Kind Code:
A3
Abstract:
A Method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operating with an arbitrary fluid.
Inventors:
WANG CHIUN (US)
LULL JOHN M (US)
VALENTINE WILLIAM S (US)
LULL JOHN M (US)
VALENTINE WILLIAM S (US)
Application Number:
PCT/US2004/009144
Publication Date:
May 19, 2005
Filing Date:
March 25, 2004
Export Citation:
Assignee:
CELERITY GROUP INC (US)
WANG CHIUN (US)
LULL JOHN M (US)
VALENTINE WILLIAM S (US)
WANG CHIUN (US)
LULL JOHN M (US)
VALENTINE WILLIAM S (US)
International Classes:
G01F1/684; G01F1/696; G01F5/00; (IPC1-7): G01F1/00; G01F25/00; G01F1/696
Foreign References:
| EP0834723A1 | 1998-04-08 | |||
| US20020198668A1 | 2002-12-26 |
Other References:
SHERIFF D: "MASS FLOW CONTROLLER FEATURES DIGITAL CALIBRATION", 1 February 1993, SOLID STATE TECHNOLOGY, COWAN PUBL.CORP. WASHINGTON, US, PAGE(S) 33-34,36, ISSN: 0038-111X, XP000343996
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