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Title:
FLOW SENSOR
Document Type and Number:
WIPO Patent Application WO2004010087
Kind Code:
A3
Abstract:
An apparatus and method for measuring flow. A flow sensor includes a sensor conduit and a bypass having at least one capillary tube. At least one of the length, inside diameter, and cross-sectional shape of the sensor conduit is substantially equal to the corresponding length, inside diameter, and cross-sectional shape of the at least one capillary tube.

Inventors:
WANG CHIUN
Application Number:
PCT/US2003/022643
Publication Date:
April 08, 2004
Filing Date:
July 18, 2003
Export Citation:
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Assignee:
CELERITY GROUP INC (US)
International Classes:
G01F1/48; G01F1/684; G01F5/00; (IPC1-7): G01F1/68
Foreign References:
US5804717A1998-09-08
US5965813A1999-10-12
US4519246A1985-05-28
US5824894A1998-10-20
US6044701A2000-04-04
US5730181A1998-03-24
Other References:
See also references of EP 1523658A2
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