Title:
FLOW-THROUGH WASHING METHOD AND FLOW-THROUGH WASHING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/131478
Kind Code:
A1
Abstract:
Disclosed are a flow-through washing method and a flow-through washing apparatus which efficiently remove dust sticking to the surface of a substrate and prevent dust from sticking to the surface of the substrate again after washing. The flow-through washing method runs washing liquid (L) inside a washing tank (2) in the lateral direction, and applies an ultrasonic vibration to the washing liquid (L) in a state in which an object (W) to be washed is immersed in this washing liquid (L), while washing this object (W). By regulating the flow rate of the washing liquid (L) flowing in any of the feed ports (3) and/or discharge ports (5) of a plurality of feed ports (3) which feed the washing liquid (L) to the washing tank (2) and plurality of discharge ports (5) which discharge washing liquid (L) from the washing tank (2), the washing liquid (L) inside the washing tank (2) can be set so as to run in a laminar flow state.
Inventors:
SAKAGUCHI, Ryuji (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
坂口竜二 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
OSHIMA, Norio (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
大島徳夫 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
坂口竜二 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
OSHIMA, Norio (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
大島徳夫 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
Application Number:
JP2010/003269
Publication Date:
November 18, 2010
Filing Date:
May 14, 2010
Export Citation:
Assignee:
SHOWA DENKO K.K. (13-9, Shibadaimon 1-chome Minato-k, Tokyo 18, 〒1058518, JP)
昭和電工株式会社 (〒18 東京都港区芝大門一丁目１３番９号 Tokyo, 〒1058518, JP)
SAKAGUCHI, Ryuji (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
坂口竜二 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
OSHIMA, Norio (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
昭和電工株式会社 (〒18 東京都港区芝大門一丁目１３番９号 Tokyo, 〒1058518, JP)
SAKAGUCHI, Ryuji (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
坂口竜二 (〒67 千葉県市原市八幡海岸通５番の１ 昭和電工エレクトロニクス株式会社内 Chiba, 〒2900067, JP)
OSHIMA, Norio (5-1 Yawata Kaigan dori, Ichihara-sh, Chiba 67, 〒2900067, JP)
International Classes:
G11B5/84; B08B3/12
Attorney, Agent or Firm:
SHIGA, Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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Claims: