Title:
FLOW VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2003/093838
Kind Code:
A1
Abstract:
A flow velocity sensor, comprising a base stand having a space part, a thin-film layer formed on the surface of the base stand where the space part is formed, a first temperature measuring resistance element and a second temperature measuring resistance element formed on the thin-film layer and connected in series to each other, a flow velocity calculation means for calculating the flow velocity of fluid based on a temperature difference between the first and second temperature measuring resistance elements, and a control means for controlling the first and second temperature measuring resistance elements so that the averaged temperature of the first and second temperature measuring resistance elements is always higher by a specified temperature than the ambient temperature.
Inventors:
NAKATA TAROU (JP)
KAMIUNTEN SHOJI (JP)
NAKANO SEISHI (JP)
KAMIUNTEN SHOJI (JP)
NAKANO SEISHI (JP)
Application Number:
PCT/JP2003/005473
Publication Date:
November 13, 2003
Filing Date:
April 28, 2003
Export Citation:
Assignee:
YAMATAKE CORP (JP)
NAKATA TAROU (JP)
KAMIUNTEN SHOJI (JP)
NAKANO SEISHI (JP)
NAKATA TAROU (JP)
KAMIUNTEN SHOJI (JP)
NAKANO SEISHI (JP)
International Classes:
G01F1/692; G01F1/698; G01F1/699; G01P5/12; (IPC1-7): G01P5/12; G01F1/68
Foreign References:
| JPS63208717A | 1988-08-30 | |||
| JPH02259527A | 1990-10-22 | |||
| JPH07243888A | 1995-09-19 |
Attorney, Agent or Firm:
Yamakawa, Masaki c/o Yamakawa International Patent 0ffice (8th Floor Shuwa-Tameike Building, 4-2,
Nagatacho 2-chom, Chiyoda-ku Tokyo, JP)
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