Title:
FLOWING LIQUID-TYPE ULTRASONIC CLEANING MACHINE, NOZZLE THEREOF, AND ULTRASONIC CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/021648
Kind Code:
A1
Abstract:
Provided is a nozzle of a flowing liquid-type ultrasonic cleaning machine that is capable of initiating ultrasonic waves almost simultaneously with starting supply of a cleaning liquid and that can allow a short period of heating without liquid. This nozzle (11) of a flowing liquid-type cleaning machine discharges a cleaning liquid (W1), on which ultrasonic waves have been superimposed, as a stream and ultrasonically cleans an object (2). The nozzle is provided with a main nozzle body (12), a plate-shaped ultrasonic vibrator (31), and a vibrating body 41. The main nozzle body (12) has: a tapered cavity (14) that forms a portion of a flow channel (R1) through which the cleaning liquid (W1) flows; and a discharge port (15) for discharging the cleaning liquid (W1) in the cavity (14). The plate-shaped ultrasonic vibrator (31) is disposed on the base end-side of the cavity (14). The vibrating body (41) comprises a chemically resistant non-metallic inorganic material. The vibrating body (41) is tightly fixed to the front end face (31b) of the ultrasonic vibrator (31) and occupies at least half of the volume of the internal space (18) of the cavity (14). The cleaning liquid (W1) flows in the gap (46) between the outer surface of the vibrating body (41) and the inner wall surface of the cavity (14).
Inventors:
HIKIDA TOMOMI (JP)
Application Number:
PCT/JP2018/027811
Publication Date:
January 30, 2020
Filing Date:
July 25, 2018
Export Citation:
Assignee:
HONDA ELECTRONIC (JP)
International Classes:
B08B3/12; H01L21/304
Foreign References:
| JP2008080293A | 2008-04-10 | |||
| JP2003340386A | 2003-12-02 | |||
| JPH03181378A | 1991-08-07 | |||
| JP2012043830A | 2012-03-01 | |||
| JP2004275721A | 2004-10-07 | |||
| JP2000334403A | 2000-12-05 | |||
| JP2004148179A | 2004-05-27 | |||
| JP5786166B2 | 2015-09-30 |
Attorney, Agent or Firm:
ATSUMI Hisahiko (JP)
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