Title:
FLOWRATE SENSOR AND FLOWRATE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/121680
Kind Code:
A1
Abstract:
Disclosed is a flowrate sensor having a flowrate detection means built into a surface mounted package. The flowrate sensor is equipped with: a fluid path (70) that is formed within the package (12), and which draws fluid from a fluid intake (30) provided to the underside of the package (12) to a fluid outlet (32) provided to the underside of the package (12) passing via a flowrate detection means; and an external terminal (40) that is provided to the outer surface of the package (12), and through which the electric output of the flowrate detection means is drawn. The flowrate sensor can be used for both fluids and gases. The flowrate sensor can be miniaturized, can be surface mounted on an electronic circuit board and the like, and is highly reliable.
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Inventors:
KABASAWA, Yasunari (2161-21, Miyama-cho, Hachioji-sh, Tokyo 52, 〒1920152, JP)
椛澤 康成 (〒52 東京都八王子市美山町２１６１－２１株式会社菊池製作所内 Tokyo, 〒1920152, JP)
椛澤 康成 (〒52 東京都八王子市美山町２１６１－２１株式会社菊池製作所内 Tokyo, 〒1920152, JP)
Application Number:
JP2010/005658
Publication Date:
October 06, 2011
Filing Date:
September 16, 2010
Export Citation:
Assignee:
KIKUCHI SEISAKUSHO CO., LTD. (2161-21, Miyama-cho Hachioji-sh, Tokyo 52, 〒1920152, JP)
株式会社菊池製作所 (〒52 東京都八王子市美山町２１６１－２１ Tokyo, 〒1920152, JP)
KABASAWA, Yasunari (2161-21, Miyama-cho, Hachioji-sh, Tokyo 52, 〒1920152, JP)
株式会社菊池製作所 (〒52 東京都八王子市美山町２１６１－２１ Tokyo, 〒1920152, JP)
KABASAWA, Yasunari (2161-21, Miyama-cho, Hachioji-sh, Tokyo 52, 〒1920152, JP)
International Classes:
G01F1/00; B81B3/00; G01F1/42; G01F15/14; H01L29/84
Attorney, Agent or Firm:
YAMADA, Fumio et al. (Ohba Bldg. A 2F, 28-4 Maruyama-cho, Shibuya-k, Tokyo 44, 〒1500044, JP)
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Claims: