Title:
FLUID CONTROL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/023970
Kind Code:
A1
Abstract:
A fluid control apparatus is provided with a fluid control valve for controlling
the pressure of a fluid by pressure operation of a fluid for control; a flow volume
measuring apparatus for measuring the flow volume of the fluid, converting the
measured value of the flow volume into electric signals and outputting the signals;
and a control section for outputting a command signal for controlling an opening
area of the fluid control valve to the fluid control valve or to an apparatus which
operates the fluid control valve, based on a deviation of the electric signal
from a set flow volume outputted from the flow volume measuring apparatus.
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Inventors:
YOSHINO KENRO (JP)
KAMIMURA SHINOBU (JP)
KAMIMURA SHINOBU (JP)
Application Number:
PCT/JP2006/316782
Publication Date:
March 01, 2007
Filing Date:
August 21, 2006
Export Citation:
Assignee:
ASAHI ORGANIC CHEM IND (JP)
YOSHINO KENRO (JP)
KAMIMURA SHINOBU (JP)
YOSHINO KENRO (JP)
KAMIMURA SHINOBU (JP)
International Classes:
F16K31/126; G05D7/06; F16K41/12
Foreign References:
| JP2002276845A | 2002-09-25 | |||
| JP2004038571A | 2004-02-05 | |||
| JPH02257205A | 1990-10-18 | |||
| JP2005155878A | 2005-06-16 | |||
| JP2003280745A | 2003-10-02 | |||
| JPH11154022A | 1999-06-08 | |||
| JP2004176812A | 2004-06-24 | |||
| JP2005196401A | 2005-07-21 | |||
| JPH05172599A | 1993-07-09 | |||
| JPH11265217A | 1999-09-28 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (Toranomon 37 Mori Bldg., 5-1, Toranomon 3-chom, Minato-ku Tokyo 23, JP)
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