FLUID CONTROL DEVICE, ABNORMALITY DETECTION METHOD OF FLUID CONTROL DEVICE, ABNORMALITY DETECTION DEVICE, AND ABNORMALITY DETECTION SYSTEM

WIPO Patent Application WO/2020/031628

A1

[Problem] To enable detecting a fluid leak in a fluid control device even if the leak is small. Further, to detect fluid leaks with high accuracy, differentiating fluid leak abnormalities from changes associated with operation of the fluid control device. [Solution] This fluid control device V1, capable of detecting abnormalities and provided with a flow path and a closed space S2 isolated from the flow path by a diaphragm 22, is provided with a pressure sensor P which detects the pressure inside a closed space S1, a processing module which performs prescribed information processing, and an operation detection mechanism which detects operation of the fluid control device V1, wherein the processing module, by comparing a detected value detected by the pressure sensor P and a prescribed threshold value, performs determination processing for determining abnormalities in the fluid control device V1 and correction processing for correcting the prescribed threshold value in accordance with operation of the fluid control device V1.

TANNO RYUTARO (JP)
SHINOHARA TSUTOMU (JP)
SUZUKI YUYA (JP)
KISO HIDENORI (JP)

PCT/JP2019/027962

February 13, 2020

July 16, 2019

Click for automatic bibliography generation  

FUJIKIN KK (JP)

G01M3/26; F16K37/00

WO2015181609A1	2015-12-03
WO2018150949A1	2018-08-23

JP2008133800A	2008-06-12
JP2007162873A	2007-06-28
JP2002168400A	2002-06-14
JPH0291932U	1990-07-20
JPH07306721A	1995-11-21
JP2007525622A	2007-09-06

KASUKAWA Toshio (JP)

View/Download PDF      PDF Help

Previous Patent: TRANSFER DEVICE FOR CONTENT DELIVERY NETWORK

Next Patent: FLUID CONTROL APPARATUS, FLUID CONTROL DEVICE, AND OPERATION ANALYSIS SYSTEM