Title:
FLUID CONTROL DEVICE AND PRODUCT MANUFACTURING METHOD USING THE FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/079288
Kind Code:
A1
Abstract:
[Problem] To provide a fluid control device which is further miniaturized and integrated without reducing the supply flow rate of a fluid. [Solution] This fluid control device comprises base blocks 10B, 10C and fluid devices 120, 130 arranged on the upper surfaces of the base blocks 10B, 10C, respectively. The base blocks 10B, 10C each have projecting tube portions 10p2, 10p1 projecting in the longitudinal direction. The projecting tube portions 10p2, 10p1 each communicate with a corresponding second flow passage 13d. The projecting tube portion 10p2 on the downstream end surface of the base block 10B and the projecting tube portion 10p1 on the upstream end surface of the base block 10C are air-tightly and liquid-tightly connected to each other by a welding material WL.
Inventors:
DOYA HIDEHIRO (JP)
Application Number:
PCT/JP2017/037042
Publication Date:
May 03, 2018
Filing Date:
October 12, 2017
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K27/00; H01L21/02
Foreign References:
| JP2008298179A | 2008-12-11 | |||
| JP2005539375A | 2005-12-22 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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