Title:
FLUID CONTROL DEVICE AND SENSOR HOLDING MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/180886
Kind Code:
A1
Abstract:
[Problem] To provide a fluid control device to which a temperature sensor is securely fixed, and in which thermal contact between the temperature sensor and the inner circumferential surface of a leak port is reliably maintained. [Solution] A fluid control device 3 holding a temperature sensor 7 includes: the temperature sensor 7 inserted in a leak port LP; and a sensor holding member 8 which is provided directly above the leak port LP and which holds the temperature sensor 7 in the state of being inserted in the leak port LP. The sensor holding member 8 comprises: a base part 81 provided directly above the leak port LP; and a through hole 8a which is provided in the base part 81, in which the temperature sensor 7 is inserted, and which is connected to the leak port LP. The base part 81 has a length so as to be accommodated in the width, in the short direction, of the fluid control device 3. Further, a predetermined angle is formed between the through hole 8a in the sensor holding member 8 and the leak port LP.
Inventors:
FUJINE KAZUHIRO (JP)
DOYA HIDEHIRO (JP)
DOYA HIDEHIRO (JP)
Application Number:
PCT/JP2018/011394
Publication Date:
October 04, 2018
Filing Date:
March 22, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K37/00; F16K27/00; G01K1/14
Domestic Patent References:
| WO2014136557A1 | 2014-09-12 |
Foreign References:
| JP2010503000A | 2010-01-28 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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