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Title:
FLUID CONTROL DEVICE AND STRUCTURE FOR INSTALLING THERMAL SENSOR AT FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/136557
Kind Code:
A1
Abstract:
Provided are: a fluid control device that effectively uses the space of a fluid control device and can install a thermal sensor for temperature management by means of a simple installation; and a structure for installing the thermal sensor at the fluid control device. The fluid control device (1) is provided with: a first fluid control apparatus (3) and second fluid control apparatus (4) that are adjacent to each other; and a thermal sensor (17) that measures the temperature of a fluid flowing within the first fluid control apparatus (3). The fluid control device (1) is further provided with a support member (19) that supports the thermal sensor (17) and is attached to the second fluid control apparatus (4).

Inventors:
YOKOTA, Jun (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
YOSHIDA, Takahiro (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
NGUYEN, Thanh Tung (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
MATSUDA, Takahiro (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
Application Number:
JP2014/053609
Publication Date:
September 12, 2014
Filing Date:
February 17, 2014
Export Citation:
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Assignee:
FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku Osaka-sh, Osaka 12, 〒5500012, JP)
International Classes:
F16K27/00; G05D7/06
Foreign References:
JP2006083959A2006-03-30
JPH0774113A1995-03-17
JP2002250645A2002-09-06
JP2006519339A2006-08-24
Attorney, Agent or Firm:
WATANABE, Akira et al. (3rd Floor Inaba Building, 13-18, Nishishinsaibashi 1-chome, Chuo-ku, Osaka-sh, Osaka 86, 〒5420086, JP)
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